This machine allows testing & development of Sensor Heads in an operating environment. The sensors can be operated while monitoring a rotating carrier of wafers, to duplicate the actual operating system.
This is a universal system, and can be configured to simulate most types of systems such as: D180, E300, E400, E450, K465.
An MOCVD Reactor Cart and Chamber has been specially modified for this purpose.

Most any round wafer carriers platters can be run. A special susceptor is interchangeable to fit the different carrier sizes. Standard carriers from the various machines are then placed onto the susceptor. Carriers such as the following can be setup: D180, E300, E400, E450, K465.

Wafer size and count depends on the specific carrier installed. Customers may submit a specific carrier and wafer type for testing.

Sensor Heads are mounted on a precision linear slide mechanism, so any position of head to wafer ring radius can be set. Most any configuration of heads can be accomplished. One, two, three or four heads can be setup, heads can be of any type or combination. Mounting focal hight is set by using different tube lengths to match the target system.

The wafer carrier uses the same rotation spindle mechanism and Ferrofluidic hub as the standard reactor chambers. Rotation from 0 to 1,200rpm.