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Temperature Calibration


Secondary Reference PRT
Our Platinum Reference Temperature measurement system is used to provide a goal of +-0.1 ℃ accuracy for our sensor head calibrations.
We use a Fluke 5626 Secondary Reference PRT with ASL F250 Precision AC Bridge readout.

Under laboratory conditions, our precision sensor heads & electronics will give +-0.1 ℃ short term repeatability over 24 hours. For end user FAB conditions, these heads should yield +-0.25 ℃ repeatability. Systems must be checked and calibrated yearly to maintain the noted performance.

The Fluke 5626 has 0.01 ℃ short term repeatability, 0.009 ℃ accuracy at 0 ℃, 0.025 accuracy at 500 ℃
The ASL F250 has 0.001 ℃ readout resolution, system accuracy with PRT of 0.020℃ (-189℃ to 420℃), 0.035℃ (+420℃ to +550℃).
Black Body Systems
The various Black Body systems are used as the basis for precision pyrometer calibration. The sensor head pyrometers are calibrated here.
Low Range Temperature Black Body
Three primary Black Body systems are used. The sensor head to be calibrated is moved to each station in sequence.
This M300 #1 Low Range unit is setup to calibrate from 0 to 700 ℃.
High Range Temperature Black Body
This M300 #2 High Range unit is setup to calibrate from 700 to 1,000 ℃.
High Temperature Black Body
This M330 #3 unit is setup to calibrate from 1,000 to 1,700 ℃.
Quick Ramp Black Body
This M365 unit can change to a new temperature quickly (with less accuracy). It is used to check (not calibrate) intermediate temperature ranges in 50℃ steps under 1,000 ℃.


Contact Island Thin Film Equipment
Island Thin Film
Shanghai Street, Mong Kok Kowloon, HK China
Yardley, Bucks County, PA 19067 USA